Integration of grating-image-type encoder using Si micromachining-Reference-Cited by-同舟云学术

Integration of grating-image-type encoder using Si micromachining

Published:2002-04 Issue: Volume:97-98 Page:139-146
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Hane K.,Endo T.,Ishimori M.,Ito Y.,Sasaki M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

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3. R. Sawada, E. Higurashi, O. Ohguchi, Y. Jin, Long-lift micro-laser encoder, in: Proceedings of the MEMS, 2000, pp. 491–495.

4. Optical encoder using a slit-width-modulated grating;Ieki;J. Mod. Opt.,1999

5. Pitch-modulated phase grating and its application to displacement encoder;Ieki;J. Mod. Opt.,2000

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