Error Compensation for Low-Density Circular Gratings Based on Linear Image-Type Angular Displacement Measurements
Author:
Affiliation:
1. Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, China
Funder
National Natural Science Foundation of China
Jilin Scientific and Technological Development Program
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Control and Systems Engineering
Link
http://xplorestaging.ieee.org/ielx7/41/9970766/09673116.pdf?arnumber=9673116
Reference23 articles.
1. High Precision Angular Measurement via Dual Imaging Detectors
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