Fabrication of an electrostatic lens array with separate electrodes and shield membranes using the UV-LIGA process-Reference-Cited by-同舟云学术

Fabrication of an electrostatic lens array with separate electrodes and shield membranes using the UV-LIGA process

Published:2002-04 Issue: Volume:97-98 Page:416-421
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Ono Haruhito,Nagae Kenichi,Shimada Yasuhiro,Maehara Hiroshi,Yagi Takayuki,Muraki Masato,Okunuki Masahiko

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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