Accuracy requirements of the microarrayed Einzel lens-Reference-Cited by-同舟云学术

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Accuracy requirements of the microarrayed Einzel lens

Published:2022-01 Issue:1 Volume:40 Page:014203
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Zhang Lixin¹^ORCID,Zhang Yulu¹²,Zhao Weixia¹²,Liu Junbiao¹²,Yin Bohua¹²,Han Li¹²

Affiliation:

1. Research Department of Micro-Nano Fabrication Technology and Intelligent Electronic Device, Institute of Electrical Engineering Chinese Academy of Sciences, Beijing 100190, China

2. School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

Funder

Research Instrument and Equipment Development Project of Chinese Academy of Sciences

National Natural Science Foundation of China

Funding Project of Special Research Assistant of Chinese Academy of Sciences

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

https://avs.scitation.org/doi/pdf/10.1116/6.0001620

Reference25 articles.

1. Microminiaturization of electron optical systems

2. Electron beam technology—SEM to microcolumn

3. Arrayed miniature electron beam columns for high throughput sub-100 nm lithography

4. Arrayed miniature electron beam columns

5. Arrayed microcolumn operation with a wafer-scale Einzel lens

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