New plasma Hall effect magnetic sensors: macrosensors versus microsensors

Author:

Seo Young Ho,Han Ki-Ho,Cho Young-Ho

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. J.E. Lenz, A review of magnetic sensors, in: Proceedings of the IEEE, Vol. 78, No. 6, 1990, pp. 973–989.

2. Y. Sugiyama, J. Itoii, S. Kanemaru, Vacuum magnetic sensor with comb-shaped field emitter arrays, Proceedings of International Conference on Solid-State Sensors and Actuators, 1993, pp. 884–887.

3. S. Kawahito, Y. Sasaki, M. Ishida, T. Nakamura, A fluxgate magnetic sensor with micromachined solenoids and electroplated permalloy cores, Proceedings of International Conference on Solid-State Sensors and Actuators, 1993, pp. 888–891.

4. L.M. Miller, J.A. Podosek, E. Kruglick, A μ-magnetometer based on electron tunneling, in: Proceedings of the MEMS’96, 1996, pp. 467–472.

5. B. Eyre, K.S.J. Pister, Micromechanical resonant magnetic sensor in standard CMOS, Proceedings of International Conference on Solid-State Sensors and Actuators, 1997, pp. 405–407.

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