Micromechanical resonant magnetic sensor in standard CMOS
Author:
Eyre B.,Pister K.S.J.
Cited by
4 articles.
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1. A Lorentz force actuated magnetic field sensor with capacitive read-out;SPIE Proceedings;2013-05-17
2. New plasma Hall effect magnetic sensors: macrosensors versus microsensors;Sensors and Actuators A: Physical;2001-08
3. A universal electromagnetic microactuator using magnetic interconnection concepts;Journal of Microelectromechanical Systems;2000-12
4. A novel micromachined magnetic-field sensor;Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291);1999