Proton beam micromachining: a new tool for precision three-dimensional microstructures-Reference-Cited by-同舟云学术

Proton beam micromachining: a new tool for precision three-dimensional microstructures

Published:2001-08 Issue:1-3 Volume:92 Page:370-374
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

van Kan J.A.,Bettiol A.A.,Wee B.S.,Sum T.C.,Tang S.M.,Watt F.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. F. Cerrina, in: P. Rai Choudury (Ed.), Handbook of Microlithography, Micromachining and Microfabrication, Vol. 1, Chapter 3, SPIE Press Monograph PM39, 1997, pp. 251–319.

2. F. Watt, J.A. van Kan, T. Osipowicz, Three-Dimensional Microfabrication Using Maskless Irradiation with MeV Ion Beams: Proton-Beam Micromachining, MRS Bull., 2000, pp 33–38.

3. Proton micromachining: a new technique for the production of three-dimensional microstructures;van Kan;Microsyst. Technol.,2000

4. Micromachining using focused high energy ion beams: deep ion beam lithography;van Kan;Nucl. Instr. Methods,1999

5. A high resolution beam scanning system for deep ion beam lithography;Sanchez;Nucl. Instr. Methods,1998

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