Excimer laser projection micromachined free-standing polymer films
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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3. Direct etching of polymeric materials using a XeCl laser;Andrew;Appl. Phys. Lett.,1983
4. Self-developing uv photoresist using excimer laser exposure;Deutsch;J. Appl. Phys.,1983
5. Direct high-resolution excimer laser photoetching;Rice;Appl. Phys. A,1984
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