Author:
Mack Chris A.,Legband Dale A.,Jug Sven
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference10 articles.
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2. OCG Microlith. Seminar Interface '93;Drennan,1993
3. Data analysis methods for evaluating lithographic performance
4. KTI Microlith. Seminar, Proc.;Mack,1990
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