Author:
Le Brizoual L,Guilet S,Lempérière G,Granier A,Coulon N,Lancin M,Turban G
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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5. L. Le Brizoual, A. Granier, F. Clénet, Ph. Briaud, G. Lemperiere, G. Turban, Experimental study of Ti-Si-N films obtained by r.f. magnetron sputtering, Surf. Coat. Technol., 1999, in press.
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