A computational model for oxide breakdown: theory and experiments
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference45 articles.
1. For comprehensive reviews of many topics of oxide degradation, see the Special Issue, Semicond. Sci. Technol. 15 (2000)
2. IEDM Tech. Digest;Stathis,1998
3. IEDM Tech. Digest;Weir,1999
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