Author:
Kaesmaier Rainer,Ehrmann Albrecht,Löschner Hans
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. H. Löschner, R. Kaesmaier, P.W.H. de Jager, B. Mertens, White Paper on Ion Projection Lithography, submitted to International SEMATECH November 1999 (unpublished).
2. Proceedings of 15th European Conference on Mask Technology ’98;Butschke;Proc. SPIE,1999
3. MNE ’99 Rome;Letzkus;Microelectron. Eng.,2000
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