Electrical characterization of the SiO2Si system-Reference-Cited by-同舟云学术

Electrical characterization of the SiO2Si system

Published:1998-11 Issue:3-4 Volume:40 Page:113-130
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Schulz M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference20 articles.

1. MOS (Metal Oxide Semiconductor) Physics and Technology;Nicollian,1981

2. The SiO2 System;Lefevre,1988

3. Characterization Methods for submicron MOSFETs,1995

4. The Si-SiO2Interface - Electrical Properties as Determined by the Metal-Insulator-Silicon Conductance Technique

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