Automatic failure analysis of VLSI circuits using E-beam-Reference-Cited by-同舟云学术

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Automatic failure analysis of VLSI circuits using E-beam

Published:1987-01 Issue:2-4 Volume:7 Page:259-266
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Savart D.,Courtois B.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. Analyse de défaillances de VLSI par MEB;Baille,1982

2. Testing for failure analysis: New tools and new test methods;Baille,1983

3. E-Beam testing strategies for VLSI;Berger-Sabbatel,1983

4. Analyse de Défaillances de Circuit VLSI par Microscopie Electronique à balayages;Bergher,1985

5. Towards automatic failure analysis of complex ICs through E-beam testing;Bergher,1986

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Principles and Applications;Electron Beam Testing Technology;1993

2. Industrial Case Studies;Electron Beam Testing Technology;1993

3. E-beam testing using multiple adjacent image processing for prototype validation;Microelectronic Engineering;1992-03

4. A diagnostic assistant for integrated circuit diagnosis;Microelectronic Engineering;1992-03

5. Design and implementation of a high performance E-beam tester;Microelectronic Engineering;1990-05

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