Author:
Li Xinxin,Ono Takahito,Lin Rongming,Esashi Masayoshi
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. Micromechanical resonators for oscillators and filters;Nguyen,1995
2. Electrostatically driven vacuum-encapsulated polysilicon resonators, Part 1. Design and fabrication;Legtenberg;Sensors and Actuators A,1994
3. New dynamic scanning force microscopes using piezoelectric PZT microcantilevers;Itoh,1997
4. Nanoelectromechanical systems;Roukes,2000
5. Mechanical behavior of ultrathin microcantilever;Yang;Sensors and Actuators A,2000
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