Investigation of long throw PVD of titanium films from polycrystalline targets with texture-Reference-Cited by-同舟云学术

Investigation of long throw PVD of titanium films from polycrystalline targets with texture

Published:2002-09 Issue:4 Volume:63 Page:329-345
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Wolf H.,Streiter R.,Tirschler W.,Giegengack H.,Urbansky N.,Gessner T.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference20 articles.

1. D.C. Butler, K. Buchanan, S.R. Burges, N. Urbansky, S. Schmidbauer, Solid State Technology, July 2000, p. 183.

2. Molecular Gas Dynamics and the Direct Simulation of Gas Flows;Bird,1994

3. Transport Simulation in Microelectronics;Kersch,1995

4. Reaction rates for ionized physical vapor deposition modeling from molecular-dynamics calculations: Effect of surface roughness

5. II. The energy spectrum of ejected atoms during the high energy sputtering of gold

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Film Growth from Particle Raytracing: A Simulation Method for Vapor Deposition Processes with Changing Surface Topographies;2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM);2023-05

2. Performance of Sputtering Targets and Productivity;Sputtering Materials for VLSI and Thin Film Devices;2014

3. Surface characteristics of titanium targets and their relevance to sputtering performance;Thin Solid Films;2009-01

4. Morphological study of magnetron sputtered Ti thin films on silicon substrate;Materials Chemistry and Physics;2008-10

5. Effects of titanium liners prepared by ionized physical vapor deposition on source/drain series resistance;Thin Solid Films;2005-07