Morphological study of magnetron sputtered Ti thin films on silicon substrate-Reference-Cited by-同舟云学术

Morphological study of magnetron sputtered Ti thin films on silicon substrate

Published:2008-10 Issue:2-3 Volume:111 Page:414-418
ISSN:0254-0584
Container-title:Materials Chemistry and Physics
language:en
Short-container-title:Materials Chemistry and Physics

Author:

Chawla Vipin,Jayaganthan R.,Chawla A.K.,Chandra Ramesh

Publisher

Elsevier BV

Subject

Condensed Matter Physics,General Materials Science

Reference19 articles.

1. An overview on the use of titanium in the aerospace industry

2. Titanium in Medicine;Textor,2001

3. D.W. Shoesmith, D. Hardie, B.M. Ikeda, J.J. Noel, Hydrogen absorption and lifetime performance of titanium waste containers, Atomic Energy of Canada Limited Report, AECL-11770, COG-97-035-I, 1997.

4. Modeling the Failure of Nuclear Waste Containers

5. Properties of titanium thin films deposited by dc magnetron sputtering

Cited by 63 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Sputtering thin films: Materials, applications, challenges and future directions;Advances in Colloid and Interface Science;2024-08

2. Nanometer – Thick titanium film as a silicon migration barrier;Materials Today Communications;2024-08

3. Nanomechanical and Microstructural Characterization of Biocompatible Ti₃Au Thin Films Grown on Glass and Ti₆Al₄V Substrates;ACS Biomaterials Science & Engineering;2024-04-17

4. Ultra-strength of Ti films via (002) texture optimization and nanocolumnar strengthening;Materials Science and Engineering: A;2024-03

5. Influence of processing conditions on the titanium/nickel contact metallization on a silicon wafer for thermal management;Thin Solid Films;2023-11