Author:
Saint-Pol J.,Landis S.,Gourgon C.,Tedesco S.,Hanawa R.,Suetsugu M.,Akita M.,Yamamoto S.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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5. Acid-diffusion effect on nanofabrication in chemical amplification resist
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