Low-Cost MEMS Technologies

Author:

Gale B.K.,Eddings M.A.,Sundberg S.O.,Hatch A.,Kim J.,Ho T.,Karazi S.M.

Publisher

Elsevier

Reference162 articles.

1. Abgrall, P., Chuda, K., Coqueret, X., Gue, A.M., 2005. Characterization of a new generic 3D polymer technology for microTAS. In: Jensen, K.F., Han, J., Harrison, D.J., Voldman, J. (Eds.) Proceedings of the 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences. San Diego, CA: Transducers Research Foundation, pp. 687–689.

2. A novel fabrication method of flexible and monolithic 3D microfluidic structures using lamination of SU-8 films;Abgrall;J. Micromech. Microeng.,2006

3. Third generation HP thermal inkjet printhead;Aden;Hewlett-Packard J.,1994

4. Fabrication of topologically complex three-dimensional microfluidic systems in PDMS by rapid prototyping;Anderson;Anal. Chem.,2000

5. The role of knife sharpness in slitting plastic films;Arcona;J. Mater. Sci.,1999

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