Author:
Thanu Dinesh P.R.,Zhao Mingrui,Han Zhenxing,Keswani Manish
Reference127 articles.
1. Particulate Contamination and Microelectronics Manufacturing: An Introduction;Cooper;Aerosol Sci. Technol.,1986
2. Silicon-on-Insulator Material Qualification for Low-Power Complementary Metal-Oxide Semiconductor Application;Mendicino;Thin Solid Films,1995
3. Adhesion and Removal of Fine Particles on Surfaces;Ranade;Aerosol Sci. Technol.,1987
4. Particle Adhesion to Surfaces: Theory of Cleaning;Menon,1990
5. Survey of Cleaning and Cleanliness Measurement in Disk Drive Manufacture;Nagarajan;Precision Cleaning Magazine,1997
Cited by
12 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献