Atomic Layer Deposition
Author:
Publisher
Elsevier
Reference79 articles.
1. Surface chemistry of atomic layer deposition: a case study for the trimethylaluminum/water process;Puurunen;J Appl Phys,2005
2. Atomic layer deposition: an overview;George;Chem Rev,2010
3. Mathematical description of atomic layer deposition and its application to the nucleation and growth of HfO2 gate dielectric layers;Alam;J Appl Phys,2003
4. AxBAxB… pulsed atomic layer deposition: numerical growth model and experiments;Muneshwar;J Appl Phys,2016
5. Pulsed chemical vapor deposition of Cu2 S into a porous TiO2 matrix;Carbone;J Vac Sci Technol Vac Surf Films,2011
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Bifunctional Mn‐Fe Oxide Catalysts for Zn‐Air Battery Air Electrodes Fabricated Through Atomic Layer Deposition;Batteries & Supercaps;2024-07-05
2. Atomic layer deposition of ZnO on PLA/TiO2 bionanocomposites: Evaluation of surface chemistry and physical properties toward food packaging applications;Journal of Applied Polymer Science;2023-07-20
3. Growth of Multiple Island Layers during Iron Oxide Atomic Layer Deposition: An Electron Microscopy and Spectroscopic Ellipsometry Investigation;The Journal of Physical Chemistry C;2022-11-10
4. Advances in Atomic Layer Deposition of Metal Sulfides: From a Precursors Perspective;Chemistry of Materials;2022-08-08
5. Optoelectronic Gas Sensing Platforms: From Metal Oxide Lambda Sensors to Nanophotonic Metamaterials;Advanced Photonics Research;2021-05-20
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3