Chemical metrology methods for CMP quality

Author:

Pate K.,Safier P.

Publisher

Elsevier

Reference38 articles.

1. Examples of dynamic light scattering and static light scattering type PSD instruments are the Horiba instruments LA950 http://www.horiba.com/scientific/products/particle-characterization/particle-size-analysis/details/la-960-laser-particle-size-analyzer-20235/, last accessed November 2014) and the Malvern Instruments Zetasizer (http://www.malvern.com/en/products/product-range/zetasizer-range/zetasizer-nano-range/default.aspx, last accessed November 2014).

2. Example of disc centrifuge Is the CPS instruments disc centrifuge DC12000 (http://www.cpsinstruments.com/cps_website_003.htm, last accessed November 2014).

3. Example of image analysis is the malvern instruments sysmex FPIA3000 (http://www.malvern.com/en/products/product-range/sysmex-fpia-3000, last accessed November 2014).

4. Example of capillary hydrodynamic fractionation is the matec applied sciences CHDF-3000 (http://www.matecappliedsciences.com/mas/products/chdf-3000, last accessed November 2014).

5. Chemical Mechanical Planarization of Microelectronic Materials;Steigerwald,2021

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