1. Sengupta, U.K., “Excimer Lasers,” A Short Course Developed at Cymer Laser Technologies, San Diego, CA, 1992.
2. Commercial Excimer Lasers;Pummer,1991
3. Excimer Lasers;Rhodes,1979
4. Sengupta, U.K., “Excimer Laser for Microlithography: Working Knowledge and Practical Considerations,” SPIE Short Course, SC11, March, 1990.
5. Recent Advances in an Excimer Laser Source for Microlithography;Elliott;J. Vac. Sci. Technol.,1991