Recent advances in an excimer laser source for microlithography
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Published:1991-11
Issue:6
Volume:9
Page:3122
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:
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Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
4 articles.
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1. Techniques and Tools for Optical Lithography;Handbook of VLSI Microlithography;2001
2. The Excimer Laser;Ultraviolet Laser Technology and Applications;1995
3. Festkörperabtragung mit Lasern und Dünnschichtabscheidung;Laser in Technik und Forschung;1993
4. Laserinduzierte Prozesse in kondensierter Materie;Laser in Technik und Forschung;1993