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Finite element calculations and fabrication of cantilever sensors for nanoscale detection

  • Published:2000-02 Issue:1-4 Volume:82 Page:69-77
  • ISSN:0304-3991
  • Container-title:Ultramicroscopy
  • language:en
  • Short-container-title:Ultramicroscopy

Author:

Fabian J.-H.,Scandella L.,Fuhrmann H.,Berger R.,Mezzacasa T.,Musil Ch.,Gobrecht J.,Meyer E.

Publisher

Elsevier BV

Subject

Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Cited by 22 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Mathematical Models of MEMS Control Devices;Computer Design Systems. Theory and Practice;2024

2. Nanoimprint lithography process chains for the fabrication of micro- and nanodevices;Journal of Micro/Nanolithography, MEMS, and MOEMS;2014-07-18

3. Process Control of Cantilever Deflection for Sensor Application Based on Optical Waveguides;Journal of Microelectromechanical Systems;2013-06

4. Surface patterned polymer micro-cantilever arrays for sensing;Sensors and Actuators A: Physical;2011-12

5. Large area microcorrals and cavity formation on cantilevers using a focused ion beam;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-09
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