Nanoimprint lithography process chains for the fabrication of micro- and nanodevices-Reference-Cited by-同舟云学术

Nanoimprint lithography process chains for the fabrication of micro- and nanodevices

Published:2014-07-18 Issue:3 Volume:13 Page:031303
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Schift Helmut¹,Urwyler Prabitha²,Kristiansen Per Magnus³,Gobrecht Jens⁴

Affiliation:

1. Paul Scherrer Institute, Laboratory for Micro and Nanotechnology, 5232 Villigen PSI, Switzerland

2. Paul Scherrer Institute, Laboratory for Micro and Nanotechnology, 5232 Villigen PSI, SwitzerlandbUniversity of Bern, Gerontechnology and Rehabilitation Group, 3010 Bern, Switzerland

3. University of Applied Sciences and Arts, Institute of Polymer Engineering, 5210 Windisch, Switzerland

4. Paul Scherrer Institute, Laboratory for Micro and Nanotechnology, 5232 Villigen PSI, SwitzerlandcUniversity of Applied Sciences and Arts, Institute of Polymer Engineering, 5210 Windisch, Switzerland

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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