Nanoscale devices fabricated by direct machining of GaAs with an atomic force microscope
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference16 articles.
1. Nanolithography with an atomic force microscope by means of vector-scan controlled dynamic plowing
2. Nanometer‐scale lithography using the atomic force microscope
3. Nanometer scale lithography at high scanning speeds with the atomic force microscope using spin on glass
4. Atomic force microscopy and friction force microscopy of Langmuir–Blodgett films for microlithography
5. Nanolithography with an atomic force microscope for integrated fabrication of quantum electronic devices
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