Theoretical and experimental investigation of vibration-assisted scratching silicon

Author:

Wang WeijieORCID,Zhao Guanghui,Tian Yanling,Lu Zhilai,Tang Hui,Wang Fujun,Zhang Dawei

Publisher

Elsevier BV

Reference42 articles.

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3. Fabrication of complex three-dimensional nanostructures using focused ion beam and nanomanipulation;Jeon;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena,2010

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