Ion-beam thinning An atomistic view by molecular dynamics simulations
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference17 articles.
1. High-depth-resolution Auger depth profiling/atomic mixing
2. Sputtering by Ion Bombardment;Sigmund,1981
3. Effects of crystallinity on depth resolution in sputter depth profiles
4. Computer simulations of sputtering
5. Theory of ripple topography induced by ion bombardment
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1. Self-organized nanopatterning of silicon surfaces by ion beam sputtering;Materials Science and Engineering: R: Reports;2014-12
2. Microscopic machining mechanism of polishing based on vibrations of liquid;Nanotechnology;2007-01-31
3. Molecular Dynamics Simulation for Ultrafine Machining;Materials and Manufacturing Processes;2006-07
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