Author:
Li Xiaodong,Bhushan Bharat,Takashima Kazuki,Baek Chang-Wook,Kim Yong-Kweon
Subject
Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. B. Bhushan (Ed.), Tribology Issues and Opportunities in MEMS, Kluwer Academic Publisher, Dordrecht, The Netherlands, 1998.
2. Handbook of Micro/Nanotribology;Bhushan,1999
3. Modern Tribology Handbook, Vol. 1—Principles of Tribology; Vol. 2—Materials, Coatings, and Industrial Applications;Bhushan,2001
4. Nanoindentation and picoindentation measurements using a capacitive transducer system in atomic force microscopy
5. Micro/nanotribological studies of single-crystal silicon and polysilicon and SiC films for use in MEMS devices;Bhushan,1998
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