Enhanced performances of CMOS-MEMS thermopile infrared detectors using novel thin film stacks-Reference-Cited by-同舟云学术

Enhanced performances of CMOS-MEMS thermopile infrared detectors using novel thin film stacks

Published:2019-11 Issue: Volume:102 Page:103058
ISSN:1350-4495
Container-title:Infrared Physics & Technology
language:en
Short-container-title:Infrared Physics & Technology

Author:

Hou Haigang,Huang Qingwei,Liu Guiwu,Qiao Guanjun

Funder

National Natural Science Foundation of China

Key Research and Development Plan

Graduate Research and Innovation Projects

Six Talent Peaks Project

333 Talents project

Innovation/Entrepreneurship Program

Qing Lan Project

Publisher

Elsevier BV

Subject

Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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3. CMOS-compatible fabrication of thermopiles with high sensitivity in the 3–5 μm atmospheric window;Roncaglia;Sens. Actuators, B,2007

4. A 1024-element bulk-micromachined thermopile infrared imaging array;Oliver;Sens. Actuators, A,1999

5. Uncooled low-cost thermal imager based on micromachined CMOS integrated sensor array;Schaufelbuhl;J. Microelectromech. Syst.,2001

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