Photoluminescence properties of SiNx/Si amorphous multilayer structures grown by plasma-enhanced chemical vapor deposition-Reference-Cited by-同舟云学术

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Photoluminescence properties of SiNx/Si amorphous multilayer structures grown by plasma-enhanced chemical vapor deposition

Published:2006-12 Issue:2 Volume:121 Page:349-352
ISSN:0022-2313
Container-title:Journal of Luminescence
language:en
Short-container-title:Journal of Luminescence

Author:

Monroy B.M.,Santana G.,Aguilar-Hernández J.,Benami A.,Fandiño J.,Ponce A.,Contreras-Puente G.,Ortiz A.,Alonso J.C.

Publisher

Elsevier BV

Subject

Condensed Matter Physics,Biochemistry,General Chemistry,Atomic and Molecular Physics, and Optics,Biophysics

Reference14 articles.

1. Will silicon be the photonic material of the third millenium? *

2. Comparison between light emission from Si/SiNX and Si/SiO2 multilayers: role of interface states

3. Comparison of visible photoluminescence from Si ion-irradiated SiO2/Si/SiO2 films fabricated by ion beam sputtering deposition and electron beam evaporation

4. The room-temperature visible photoluminescence from nanocrystalline Si in Si/SiNx superlattices

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1. Very low-temperature growth of silicon thin films using chlorinated precursors and optical properties;Materials Science in Semiconductor Processing;2020-03

2. White electroluminescence from SiNx thin films by a PECVD equipment using dichlorosilane precursor and study of emission mechanism;Materials Technology;2019-04-15

3. Effects of Hydrogen-Dilution on Opto-Structural Properties of Hot-wire CVD Grown a-Si:H/nc-Si:H Multilayer for Photovoltaics;Silicon;2017-11-22

4. Double stack layer structure of SiN x /pm-Si thin films for downshifting and antireflection properties;Materials Letters;2017-09

5. Photoluminescence of amorphous and crystalline silicon nanoclusters in silicon nitride and oxide superlattices;Semiconductors;2017-02

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