Author:
Massimino Gianluca,Quaglia Fabio,Corigliano Alberto,Frangi Attilio
Funder
Ministero dell’Istruzione, dell’Università e della Ricerca
Subject
Acoustics and Ultrasonics
Reference52 articles.
1. Mechanics of Microsystems;Corigliano,2018
2. Thin film piezoelectrics for MEMS;Trolier-McKinstry;J Electroceram,2004
3. Shih V, Cheng S, Lin YR, Lin A, Liao YJ, Lin CH, et al. Highly reliable piezoelectric process technology in volume foundry for emerging MEMS applications. Transducers 2019 & Eurosensors XXXIII. 2019;p. 190–193.
4. Reduction of residual stress in AlN thin films synthesized by magnetron sputtering technique;Panda;Mater Chem Phys,2017
5. Multiphysics modelling and experimental validation of an air-coupled array of PMUTs with residual stresses;Massimino;J Micromechan Microeng,2018
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