Wet bench reactive hazards of cleaning stages in semiconductor manufacturing processes-Reference-Cited by-同舟云学术

Wet bench reactive hazards of cleaning stages in semiconductor manufacturing processes

Published:2006-11 Issue:6 Volume:19 Page:743-753
ISSN:0950-4230
Container-title:Journal of Loss Prevention in the Process Industries
language:en
Short-container-title:Journal of Loss Prevention in the Process Industries

Author:

Peng Deng-Jr,Duh Yih-Shing,Shu Chi-Min

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Management Science and Operations Research,Energy Engineering and Power Technology,Safety, Risk, Reliability and Quality,General Chemical Engineering,Food Science,Control and Systems Engineering

Reference27 articles.

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5. Chang, C. M. (2001). The study of hazard prevention for electro-optics industry (IOSH90-S309). San Min Book Co., Ltd., Taiwan, ROC: Institute of Occupational Safety and Health, Council of Labor Affairs, Executive Yuan.

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