Subject
Polymers and Plastics,Materials Chemistry,Organic Chemistry
Reference71 articles.
1. Christopher K. Ober, Florian Käfer and Chenyun Yuan, Recent developments in photoresists for extreme-ultraviolet lithography, Polymer 280 (2023) 126020.
2. Cramming more components onto integrated circuits;Moore;Electronics,1965
3. Design of ion-implanted MOSFET’s with very small physical dimensions;Dennard;Journal of Solid-State Circuits,1974
4. Semiconductor Device-And-Lead Structure;Royce,1961
5. Miniaturized Electronic Circuits;Kilby,1964
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