Preparation of composite and compositionally graded TiC?TiN films by liquid injection plasma-enhanced CVD
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Cited by 14 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Deposition of TiN, TiC, and DLC Coatings by PACVD;Production, Properties, and Applications of High Temperature Coatings;2018
2. Synthesis of Functional Oxide Nanoparticles Through RF Thermal Plasma Processing;Plasma Chemistry and Plasma Processing;2017-01-30
3. A Review on Titanium Nitride and Titanium Carbide Single and Multilayer Coatings Deposited by Plasma Assisted Chemical Vapor Deposition;International Journal of Engineering;2016-05-01
4. Mechanical Behavior of TiN/TiC-n Multilayer Coatings and Ti(C,N) Multicomponent Coatings Produced by PACVD;Strength of Materials;2016-03
5. Mechanical behavior of TiN/TiC multilayer coatings fabricated by plasma assisted chemical vapor deposition on AISI H13 hot work tool steel;Surface and Coatings Technology;2014-04
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