MD simulation of chemically enhanced polishing of 6H-SiC in aqueous H2O2-Reference-Cited by-同舟云学术

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MD simulation of chemically enhanced polishing of 6H-SiC in aqueous H2O2

Published:2023-12 Issue: Volume:107 Page:515-528
ISSN:1526-6125
Container-title:Journal of Manufacturing Processes
language:en
Short-container-title:Journal of Manufacturing Processes

Author:

Yang Shengyao,Li Xuliang,Zhao Yitian,Al-amin Md,Grøndahl Lisbeth,Lu Mingyuan,Cheung Chi Fai,Huang Han

Funder

Australian Research Council

University of Queensland

National Computational Infrastructure

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Management Science and Operations Research,Strategy and Management

Reference78 articles.

1. Recent developments in SiC single-crystal electronics;Ivanov;Semiconductor Sci Technol,1992

2. Ultrahigh-quality silicon carbide single crystals;Nakamura;Nature,2004

3. A review on the joining of SiC for high-temperature applications;Yoon;J Kor Ceram Soc,2020

4. A review on precision polishing technology of single-crystal SiC;Ma;Crystals,2022

5. Prediction of sawing force for single-crystal silicon carbide with fixed abrasive diamond wire saw;Wang;Mater Sci Semicond Process,2017

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Simulation of chemical reactions with methanol and oxalic acid on 4H-SiC surfaces before and after nanoabrasion;Applied Surface Science;2024-12

2. New skin corrosion effect of magnetorheological electro-Fenton polishing investigated by friction and wear experiments;Materials Science in Semiconductor Processing;2024-12

3. Microscopic removal mechanism of 4 H-SiC during abrasive scratching in aqueous H2O2 and H2O: Insights from ReaxFF molecular dynamics;Tribology International;2024-12

4. Brittle-ductile transition mechanism during grinding 4H-SiC wafer considering laminated structure;International Journal of Mechanical Sciences;2024-12

5. Investigation of the tribological behaviors for 4H–SiC substrate under different lubrication conditions;Wear;2024-11

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