Study on micro-grinding quality in micro-grinding tool for single crystal silicon
Author:
Funder
National Natural Science Foundation of China
Publisher
Elsevier BV
Subject
Industrial and Manufacturing Engineering,Management Science and Operations Research,Strategy and Management
Reference25 articles.
1. Micro grinding with ultra small micro pencil grinding tools using an integrated machine tool;Aurich;CIRP Ann Manuf Technol,2015
2. Integrated desktop machine tool for manufacturing and application of ultra-small micro pencil grinding tools;Walk;Procedia CIRP,2014
3. Manufacturing miniature products by micro-grinding: a review;Pratap;Procedia Eng,2016
4. SAFBM of softer materials: an investigation into the micro-cutting mechanisms and the evolution of roughness profile;Francis;Mater Manuf Process,2016
5. Use of vegetable oil in water emulsion achieved through ultrasonic atomization as cutting fluids in micro-milling;Burton;J Manuf Processes,2014
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