Experimental investigations into the effect of process parameters on the machining quality for ITO conductive glass by using microgroove grinding-Reference-Cited by-同舟云学术

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Experimental investigations into the effect of process parameters on the machining quality for ITO conductive glass by using microgroove grinding

Published:2024-06-08 Issue:5-6 Volume:133 Page:2401-2417
ISSN:0268-3768
Container-title:The International Journal of Advanced Manufacturing Technology
language:en
Short-container-title:Int J Adv Manuf Technol

Author:

Liu Yin^ORCID,Qiu Xiaolong,Sun Xingwei,Pan Fei,Zhang Weifeng,Mu Shibo,Zhao Hongxun,Gong Yadong

Funder

National Natural Science Foundation of China

Natural Science Foundation of Liaoning Province

Project of Liaoning Province Applied Basic Research Program

Scientific Research Funding Project of Liaoning Provincial Department of Education

Publisher

Springer Science and Business Media LLC

Link

https://link.springer.com/content/pdf/10.1007/s00170-024-13929-6.pdf

Reference44 articles.

1. Thirumoorthi M, Prakash JTJ (2016) Structure, optical and electrical properties of indium tin oxide ultra thin films prepared by jet nebulizer spray pyrolysis technique. J Asian Ceam Soc 4(1):124–132

2. Lewis BG, Paine DC (2000) Applications and processing of transparent conducting oxides. MRS Bull 25(8):22–27

3. Ren YH, Li CF, Li W et al (2019) Study on micro-grinding quality in micro-grinding tool for single crystal silicon. J Manuf Process 42246–42256

4. Aurich JC, Carrella M, Walk M (2015) Micro grinding with ultra small micro pencil grinding tools using an integrated machine tool. CIRP Ann 64(1):325–328

5. Walk M, Aurich JC (2014) Integrated desktop machine tool for manufacturing and application of ultra-small micro pencil grinding tools. Procedia CIRP 14333–14338

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