Sources, Optics, and Laser Microfabrication Systems for Direct Writing and Projection Lithography-Reference-Cited by-同舟云学术

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Sources, Optics, and Laser Microfabrication Systems for Direct Writing and Projection Lithography

Published:1989 Issue: Volume: Page:3-84
ISSN:
Container-title:Laser Microfabrication
language:
Short-container-title:

Author:

LIU Y.S.

Publisher

Elsevier

Reference191 articles.

1. Optical harmonic generation and optical frequency multipliers;Akhmanov,1975

2. Metal films removal and patterning using XeCl laser;Andrew;Apply Phys. Lett.,1983

3. Compact laser source for metal deposition;Arjavalingam,1988

4. Industrial excimer lasers;Austin,1987

5. Macro-materials processing;Banas;Proc. IEEE,1982

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The Symbiosis of Light and Matter: Laser-Engineered Materials for Photo-Functionality;MRS Bulletin;2007-01

2. Design and performance of an excimer-laser based optical system for high precision microstructuring;Optics & Laser Technology;1998-04

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