1. “Thin Film Processes”;Kern,1978
2. “Deposition Technologies for Films and Coatings”;Blocher,1982
3. “Silicon Processing for the VLSI Era.”;Wolf,1987
4. “Chemical Vapor Deposition For Microelectronic.”;Sherman,1987
5. “Handbook of Thin-Film Deposition Processes and Techniques,”;Kern,1988