DTCO flow for air spacer generation and its impact on power and performance at N7

Author:

Filipovic LadoORCID,Baumgartner Oskar,Klemenschits Xaver,Piso Julius,Bobinac Josip,Reiter Tobias,Strof Georg,Rzepa Gerhard,Stanojevic Zlatan,Karner Markus

Funder

Österreichische Forschungsförderungsgesellschaft

Technische Universität Wien Bibliothek

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. Reliability and variability-Aware DTCO flow: Demonstration of projections to N3 FinFET and nanosheet technologies;Rzepa,2021

2. Improved air spacer for highly scaled CMOS technology;Cheng;IEEE Trans Electron Dev,2020

3. Multiscale model for epitaxial growth of films: Growth mode transition;Lam;Phys Rev B,2001

4. Multiscale modeling in chemical vapor deposition processes: Models and methodologies;Cheimarios;Arch Comput Methods Eng,2020

5. Air spacer for 10nm FinFET CMOS and beyond;Cheng,2016

Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Physics-Informed Compact Model for SF6/O2 Plasma Etching;2023 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD);2023-09-27

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3