A spice-like reliability model for deep-submicron CMOS technology

Author:

Cui Z.,Liou J.J.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Advanced semiconductor device physics and modeling;Liou,1994

2. Model and analysis of gate leakage current in ultrathin nitrided oxide MOSFETs;Lee;IEEE Trans Electron Dev,2002

3. Tunneling into interface states as reliability monitor for ultrathin oxides;Ghetti;IEEE Trans Electron Dev,2000

4. Damage generation and location in n- and p-MOSFETs biased in the substrate-enhanced gate current regime;Driussi;IEEE Trans Electron Dev,2002

5. Lu Q, Takeuchi H, Lin R, King T-J, Hu C, Onishi K. et al. Hot carrier reliability of n-MOSFET with ultra-thin HfO2 gate dielectric and poly-Si gate. In: Proc international reliability physics symposium, 2002. p. 429–30.

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