Design and fabrication of a low insertion loss capacitive RF MEMS switch with novel micro-structures for actuation
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference17 articles.
1. The search for a reliable MEMS switch?;Rebeiz;IEEE Microwave Mag,2013
2. RF MEMS capacitive switch on semi-suspended CPW using low-loss high-resistivity silicon substrate;Fernandez-Bolanos;Microelectron Eng,2008
3. Cantilever type radio frequency microelectromechanical systems shunt capacitive switch design and fabrication;Demirel;J Micro/Nanolithogr MEMS MOEMS,2015
4. Design and investigation of a low insertion loss, broadband, enhanced self and hold down power RF-MEMS switch;Angira;Microsyst Technol,2015
5. An ultra-low voltage MEMS switch using stiction-recovery actuation;Kim;J Micromech Microeng,2013
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