Cantilever type radio frequency microelectromechanical systems shunt capacitive switch design and fabrication-Reference-Cited by-同舟云学术

Cantilever type radio frequency microelectromechanical systems shunt capacitive switch design and fabrication

Published:2015-09-21 Issue:3 Volume:14 Page:035005
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Demirel Kaan¹,Yazgan Erdem²,Demir Simsek³,Akin Tayfun⁴

Affiliation:

1. Hacettepe University, Department of Nanotechnology and Nanomedicine, Beytepe, Ankara 06800, TurkeybMiddle East Technical University, Department of Electrical and Electronics Engineering, Çankaya, Ankara 06800, Turkey

2. Hacettepe University, Department of Nanotechnology and Nanomedicine, Beytepe, Ankara 06800, TurkeycTED University, Department of Electrical and Electronics Engineering, Çankaya, Ankara 06420, Turkey

3. Middle East Technical University, Department of Electrical and Electronics Engineering, Çankaya, Ankara 06800, Turkey

4. Middle East Technical University, Department of Electrical and Electronics Engineering, Çankaya, Ankara 06800, TurkeydMiddle East Technical University, MEMS Research and Application Center, Eskisehir Yolu, Ankara 06520, Turkey

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. High-isolation CPW MEMS shunt switches. 1. Modeling

2. Performance of low-loss RF MEMS capacitive switches

3. A low-voltage high contact force RF-MEMS switch;Nishijima,2004

4. Design, fabrication and RF performances of two different types of piezoelectrically actuated Ohmic MEMS switches

5. Temperature variation of actuation voltage in capacitive MEMS switches

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1. Design and Optimization of Cantilever Based RF-MEMS Shunt Switch for 5G Applications;2021 16th International Conference on Design & Technology of Integrated Systems in Nanoscale Era (DTIS);2021-06-28

2. Design of An Improved Micro-Electro-Mechanical-Systems Switch for RF Communication System;Lecture Notes in Electrical Engineering;2018-12-07

3. Design and fabrication of a low insertion loss capacitive RF MEMS switch with novel micro-structures for actuation;Solid-State Electronics;2017-01