Ultra-thin body & buried oxide SOI substrate development and qualification for Fully Depleted SOI device with back bias capability

Author:

Schwarzenbach Walter,Nguyen Bich-Yen,Allibert Frederic,Girard Christophe,Maleville Christophe

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference28 articles.

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5. Basker VS et al. Symp VLSI Tech, p19, 2010.

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