Mobility enhancement by CESL strain in short-channel ultrathin SOI MOSFETs

Author:

Pham-Nguyen L.,Fenouillet-Beranger C.,Ghibaudo G.,Skotnicki T.,Cristoloveanu S.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference25 articles.

1. Germanium-on-insulator structure realized by the Smart-Cut™ Technology;Letertre;Mater Res Soc Proc,2004

2. Performance boost of scaled Si PMOS through novel SiGe stressor for HP CMOS;Chanemougame;VLSI Tech Dig,2005

3. Electrical characterization and mechanical modeling of process induced strain in 65nm CMOS technology;Ortolland;Proc ESSDERC,2004

4. FDSOI devices with thin BOX and ground plane integration for 32nm node and below;Fenouillet-Beranger;Proc ESSDERC,2008

5. A folded channel MOSFET for deep-sub tenth micron era;Hisamoto;IEDM Technol Dig,1998

Cited by 24 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Exploration of underlap induced high-k spacer with gate stack on strain channel cylindrical nanowire FET for enriched performance;Scientific Reports;2024-02-05

2. Electrical Characteristic analysis of Gate Underlap Strain Channel Cylindrical GAA FET;2023 7th International Conference on Electronics, Materials Engineering & Nano-Technology (IEMENTech);2023-12-18

3. Design and Simulation of Gate Underlap Strained Cylindrical GAA with High-K Gate Stack;2023 IEEE 3rd International Conference on Applied Electromagnetics, Signal Processing, & Communication (AESPC);2023-11-24

4. Performance Analysis of Strain Channel High-K Gate Stack Gate Underlap Cylindrical GAA FET;2023 1st International Conference on Circuits, Power and Intelligent Systems (CCPIS);2023-09-01

5. Scaling effects;Fully Depleted Silicon-On-insulator;2021

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3