Characterization of near-surface electrical properties of multi-crystalline silicon wafers

Author:

Drummond P.,Kshirsagar A.,Ruzyllo J.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. General trends about photovoltaics based on crystalline silicon;Bruton;Solar Energy Mater Solar Cells,2002

2. Angermann H, Sievert W, Klimm C, Zimmermann KU. In: Proc 9th intern symp on ultra-clean proc of semicond. Surfaces, UCPSS 2008, Bruges, Belgium; 2008.

3. Surface dopant concentration monitoring using noncontact surface charge profiling;Roman;J Appl Phys,1998

4. Roman P, Brubaker M, Staffa J, Kamieniecki E, Ruzyllo J. Non-contact monitoring of electrical characteristics of silicon surface and near-surface region. Characterization and metrology for ULSI technology, vol. 449; 2000. p. 250–4.

5. Fabrication and characterization of 186% efficiency multicrystalline silicon solar cells;Narasimha;IEEE Transactions on Electron Devices,1998

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