High deposition rate amorphous and polycrystalline silicon materials using the pulsed plasma and “Hot-Wire” CVD techniques

Author:

Madan Arun,Morrison Scott

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. The Physics and Applications of Amorphous Semiconductors;Madan,1988

2. Plasma Deposition of Amorphous Silicon Based Materials,1995

3. Amorphous silicon technology-1995, MRS Proc., vol. 377, 1995.

4. P.G. LeComber, A. Madan, W.E. Spear, in: P.G. LeComber, J. Mort (Eds.), Electronic and Structural Properties of Amorphous Semiconductors, Academic Press, New York, 1973; P.G. LeComber, A. Madan, W.E. Spear, J. Non-Cryst. Solids 11 (1972) 219. W.E. Spear, P.G. LeComber, J. Non-Cryst. Solids 8–10 (1972) 727. A. Madan, Ph.D. Thesis, University of Dundee, Scotland 1973; W.E. Spear, R.J. Loveland, A. Al-Sharbatyj, J. Non-Cryst. Solids 15 (1974) 410; A. Madan, P.G. LeComber, W.E. Spear, J. Non-Cryst. Solids 20 (1976) 239; W.E. Spear, P.G. LeComber, Phil. Mag. 33 (1976) 935.

5. High-rate deposition of amorphous hydrogenated silicon: effect of plasma excitation frequency

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