Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions-Reference-Cited by-同舟云学术

Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions

Published:2000-03 Issue:2 Volume:80 Page:189-196
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Wiegerink Remco,Zwijze Robert,Krijnen Gijs,Lammerink Theo,Elwenspoek Miko

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. H. Wensink, M.J. de Boer, R.J. Wiegerink, A.F. Zwijze, M.C. Elwenspoek, First micromachined silicon load cell for loads up to 1000 kg, Proc. SPIE '98, Vol. 3514 (Micromachined Devices and Components IV), 1998.

2. Quasi-monolithic planar load cells using built-in resonant strain gauges;Tilmans;J. Micromech. Microeng.,1993

3. W. Kern, Handbook of Semiconductor Wafer Cleaning Technology, Noyes Publications, Westwood, NJ, USA, 1993.

4. A voltage-controlled switched-capacitor relaxation oscillator;Martin;IEEE J. Solid-State Circuits,1981

5. A low-cost, smart capacitive position sensor;Toth;IEEE Trans. Instrum. Meas.,1992

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Precision in harsh environments;Microsystems & Nanoengineering;2016-10-10

2. Differential capacitive sensing circuit for a multi-electrode capacitive force sensor;Sensors and Actuators A: Physical;2015-10

3. Six-axis force–torque sensor with a large range for biomechanical applications;Journal of Micromechanics and Microengineering;2014-02-28

4. 3D force sensor for biomechanical applications;Sensors and Actuators A: Physical;2012-08

5. System integration design in MEMS — A case study of micromachined load cell;Sadhana;2009-08